Vacuum Chuck

? Stainless steel chuck table size 4", flatness 5μm, with 3 vacuum adsorption holes

? Stainless steel chuck table sizes 6", 8", 12", flatness 5μm, with 4 vacuum adsorption holes

? Silent oil-free air pump, 7 L/min, capable of continuous operation

Constant Temperature Vacuum Chuck

? Aluminum alloy chuck table sizes 4", 6", 8", flatness 5μm.

? With 3-4 vacuum adsorption holes

? Silent oil-free air pump, 7 L/min, capable of continuous operation

? Capable of water or gas circulation cooling

? Includes heating function, maximum heating temperature 300°C, temperature control accuracy ±1°C, display accuracy 0.1°C,

Temperature uniformity within effective area ±5°C.

? Optional refrigeration function, minimum temperature -130°C (under vacuum environment).

? Equipped with rapid cooling function, configured with water cooling interface, can connect to a chiller for fast cooling.