The new Precis? 200 is based on Micro-Metric's Innova wafer measurement system, utilizing VMM Company's excellent design and technology.

, The new Precis includes many configurable options, making the equipment highly versatile and reliable.

Extended Z-axis range – 2.5mm, 5mm or 100mm

Transmission illumination

Complete electronic drawing – fully compliant with SEMI S2 and CE standards

Ergonomic operator console with hidden keyboard tray, adjustable height and angle control panel and display, SEMI S8 compliant

Fully automated microscope, all settings computer-controlled

High-resolution pixel camera

VIEW Metrology Software (VMS?) can measure a wide range of components, with optional CAD import and full geometric dimension and tolerance import.

MMWin – Wafer and Mask metrology software – critical dimension and overlay measurements for wafers, slider ABS, photomasks, and flat panel displays.

Standard Optional

X,Y,Z travel (mm): 200 x 200 x 5 Load capacity: 12 kg

XY accuracy: E1=(0.25+2L/1000)μm

Z accuracy: E1=(0.25)μm (with use of a 100X lens)

Resolution: 0.01 μm

Field of view measurement accuracy and repeatability: 0.01 μm (100x)

DC servo motor drive