Semiconductor Material Dry Cleaning Machine V1000X
Contact Info
- Address:廣州市天河區(qū)廣汕二路13號-327-1房, Zip: 510630
- Contact: 譚真東
- Tel:020-87031216
- Email:13808866455@139.com
Other Products
Guangzhou Jincheng Scientific Instrument Co., Ltd. supplies Yamato YAMATO plasma cleaner models V1000/V1000X/V1000XS, featuring 13.56MHz high-frequency output and equipped with RIE/DP dual modes. Applications include ashing and etching of silicon wafers, substrate surface contamination treatment, IC/LED packaging, BGA/CSP substrate processing, dry cleaning of electronic materials for semiconductor-related components, removal of natural oxide films and organic matter, interfacial activation treatment, and surface contaminant removal.
Plasma CleanerFeatures:
Ashing and etching of silicon wafers.
Substrate surface contamination treatment.
IC/LED packaging, BGA/CSP substrate processing.
Dry cleaning of electronic materials for semiconductor-related components.
Removal of natural oxide films and organic matter.
Interfacial activation treatment.
Surface contaminant removal.
Plasma Cleaner Technical Parameters:
Model | V1000 | V1000X | V1000XS |
Plasma Mode | DP/RIE | ||
High-Frequency Power Supply | 13.56MHz | ||
Output Power | 1000W | 1000&1500W | |
Effective Electrode Size | W280xD280mm | W300xD300mm | W400xD375mm |
Electrode | Parallel Plate | Two-Stage Electrode (Independent) | Plate (Multi-Purpose) |
Reaction Gas | Polymerization Controller 2 Systems (Gas Lines Installed Separately) | ||
Vacuum Pump (Standard) | Approx. 1000L/min | Approx. 1500L/min | 1000&1500L/min |
Safety Devices | Door Detection Switch, Interlock Mechanism, Emergency Stop Switch, Over-Temperature Prevention Device, etc. | ||
YamatoYAMATO Plasma Cleaner V1000/V1000X/V1000XS information is provided by Guangzhou Jincheng Scientific Instrument Co., Ltd. For more details about plasma cleaners, please feel free to contact us.
| Industry Category: | Electronic Components & Supplies/Semiconductor Materials/Semiconductor Materials |
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